MICRO-ELECTRONICS RESEARCH LABORATORY Photolithography - MERL Clean Room Wet Chemistry - MERL Clean Room Oxidation/Diffusion Crystal Growth - MERL Clean Room Dry Process - MERL Clean Room

Microelectronics Research Laboratory

The Microelectronics Research Laboratory closely works with researchers in academic, government and industry to help solve problems in multidisciplinary science and engineering and high-tech industry, to train students and to carry out advanced research in micro- and nano-optoelectronics, solid state devices and electronic materials. The capabilities of the laboratory include a dry processing area for plasma processing, thin film metallization and dielectric, thermal processing, ultraviolet lithography, nano-imprint and most recently atomic layer deposition.

Access to MERL

Access Procedure

Please fill out two attached forms and send them with your REHS Certificate to merl.rutgers@gmail.com

E-mail subject heading of "[MERL Admission] Your Name"

Please indicate your unaccepted day and time of safety training, such as Monday morning in the e-mail, so we can schedule the training.

Files should be attached in the e-mail:

NIST Researchers join MERL


A team of NIST researchers joined MERL as the latest external government users, for advanced research and development of TFET and Nano Switching Memory applications.