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Equipment Rate

Equipment List

 

Effective 04/12/15

 

Equipment(Some with multiple units)

Description

Rates* ($/hr)

External

Rutgers

General

Facility Access

Entitles user to all facilities except:

a. equipment with hourly rate listed separately below

b. excessive or expensive consumables, precious metal and gases

c. overlong or special processes

60

30

Technical Support

Personnel support beyond normal need

100

50

Lithography

Karl Suss Contact Printer

Photolithography Contact Printer

70

35

Nanonex Nanoimprint System**

Nanolithography Nanoimprint System

50

25

Laurell Spin Coater

Manual Photoresist Spin Coater

0

0

Thermolyne Hot Plate

Hot Plate Unit

0

0

Cole Palmer Hot Plate

Digital Hot Plate & Stirrer

0

0

Dexon Process Bench

Photolithography Chemical Process Bench

0

0

Ultra Tech Mask Cleaner

Photo Plate Cleaner

0

0

Deposition

Varian E-Beam System

Evaporation Deposition

70

35

Plasma Therm PECVD

Plasma Enhanced Chemical Vapor Deposition

70

35

Unaxis PECVD

Plasma Enhanced Chemical Vapor Deposition

70

35

System Design Sputter Machine

Sputter Deposition

70

35

Denton Sputter Machine

Sputter Deposition

70

35

Wet Chemistry/Etch

Wet Etch Bench

Dexon Process Benches

0

0

Glove Box

Hazard Process/Controlled Enclosures

0

0

       

Dry Etch & CMP

Unaxis Etcher

Device Process Dry Etcher

70

35

Trion Gas Etcher

Device Process Dry Etcher

70

35

Ecomet Polisher

Chemical Mechanical Polisher

0

0

       

Thermal Process

Thermco Furnace Tubes

Oxidation/Diffusion/Annealing Furnace

0

0

Lindberg Furnace

Multi Process Furnace Tube

0

0

Heatpluse RTA System

Rapid Thermal Anneal

0

0

Blue-M Box Ovens

Process Dehydration Ovens

0

0

Thermotron Chamber

Burn In Chamber

0

0

Metrology/Inspection

ISI SEM (microelectronics)***

Scanning Electron Microscope

60

30

Leitz Microscope

Multi Function Inspection Microscope

0

0

Nanometrics Film Thickness

Film Thickness Measurement

0

0

Dektak Alpha Prolifometer

Surface Profiler

0

0

Particle Inspection Unit

Particle Analyzer System

0

0

Characterization

Magne-Tron Probe

Device - 4 Point Probe

0

0

Electroglass Probe

Automated Electronics Probe Station

0

0

Temp Vacuum System

High Voltage-Temperature Vacuum System

0

0

Hall Effect Electromagnet

Hall Effect Measurement

0

0

* Listed are typical rates. MERL offers lower rates (monthly, contract, fee caps, membership, price match) based on usage.

** For usage, please contact Professor Wei Jiang ( wjiangnj@ece.rutgers.edu)

*** All SEM users should take the training course in MSE Department/IAMDN to get the certification. MERL has a less advanced SEM system than the one in MSE/IAMDN. However, MERL does not have their own technical staff member to conduct SEM training. After successfully passing the training, then the student can use the SEM at MERL and MSE/IAMDN.

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